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장비구성
JSM-6360LV SEM main unit
61090(MS) 2-axis motor stage(Max specimen size 150 mm, 80x40mm)
47414 PC unit(2 USB port, PC card slot)
34470 backscatter electron detector
47512 CRT monitor
65020(PRD2) device for photography
65040(CSI2) device for scan image photography
65150(OKB) operation keyboard
49020 chiller
LGSHL solvent holder
ACC,PC